.' . . , . . , i get-be-ooo6 1/4 "'-.i qualification test report on si mmic . (use uhso process) prepared on :june 26,2003 by: i.( fji$; yasushisatoh assistant manager approved by : j. f~~.().io-'j"~- toshiaki yokoka w a manager reliability and qc department nec compound semiconductor devices,ltd. , i.' ,
get-be-0006 2/4 1. introduction this report presents uhso (ft =25ghz) process qualification test result. the process qualification test was performed by upc8182b(b). 2. qualification test items and failure criteria 2. 1 thermal environmental test (table. 1.2) 2.2 mechanical environmental test (table. 1.2) 2. 3 high temperature dc bias test (table. 1.2) 3. result 3.1 thermal and mechanical environmental test as shown table 3.no failure was observed with respect to thermal environmental test and mechanical environmental test. 3.2 high temperature dc bias test high temperature dc bias test at ta=200t was performed for upc8182b(b) using 100 samples. the test was performed for 3000 hours. the test results are shown table 3.no failure has been observed for 3000 hours. llicc change is shown in fig.1.
get-be-0006 3/4 table i test item and test condition test condition sample test items mil-std 883 method size thermal environmental test a) solderability 2003 b) temperature cycling 1010:cond.d -65'c +200'c.ioocycles , c)thermal shock 1011:cond.a o'c +100'c.15cycles 8 d) moisture resistance 1004:0mit initial conditioning e) hermetic seal 1071 fine leak (cond.al) 1 x 10-9 pa m3/s (-1 x 10-8 atmcdsec) gross leak (cond.c) no stream bubble mechanical environmental test a) mechanical shock 2002: 1.47 x 104rn/s2(1500g).0.5ms.3axis.5times b)vibration. variable 2007:100 2000hz. 1 96rn/s2(20g).3axis. frequency 4min.4times 8 c) constant acceleration 2001: 1.96 x 105rn/s2(20000g).3axis.1min..1 time d) hermetic seal 1071 fine leak (cond.a1) 1 x 10- 9 pa m3/s (-1 x 10-8 atm cdsec) gross leak (cond.c) no stream bubble hi erature dc bias test 1005:ta=200'c.vcc=3v.t=3000hrs 100 table 2 parameters and criteria limits parameters symbols test condition delta criteria min max circuit current icc vcc=3v - 38ma :t 15% g 1 vcc=3v.f=0.9ghz 19db 25db - power gain g 2 vcc=3v,f=1.9ghz 18db 24db - g 3 vcc=3v,f=2.4ghz 18db 24db - vcc=3v,f=2.4ghz output power pout 7 dbm - - pin=-5dbm noise fi ure nf vcc=3v.f=2.4ghz - 6.5db - ~~_._"_. -~.~ ,..:_~~ ~,~-" ~ . ---~.
get-be-ooo6 4/4 table 3 qualification test results results test items " \ reference lfailure/sample! thermal environmental test 0/8 - mechanical environmental test 0/8 - high temp. dc bias test 0/100 (at 3000hrs) - 1 15.00% llicc 10.00% ; ~ * 5.00% ~max g 0.00% -e:- ave ~ -5.00% -.- min -10.00% -15.00% 0 168 336 1000 2000 3000 hours fig.1 icc changes on high temperature dc bias test.
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